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Introduction of Semiconductor Measuring Equipment Technology
Home - Activities
Home - ActivitiesReporter：
Huaqing Liu, Senior Algorithm Engineer, Huawei 2012 Lab
Inviter：
Wei Leng, Associate Professor
Subject：
Introduction of Semiconductor Measuring Equipment Technology
Time and place：
10:30-11:30 April 20 (Thursday), N212
Abstract：
本报告结合个人在半导体量测设备技术行业的工作经历，简要介绍半导体领域的技术，主要包括芯片制造工艺流程，光学量测技术OCD，器件几何建模，光学仿真算法RCWA和明暗场检测设备图像处理集群。